基于压电迟滞对称性的线性微位移控制作动器
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Linear Micro-displacement Control Actuator Based on Piezoelectric Hysteresis Symmetry
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    摘要:

    针对目前压电微位移控制系统中普遍存在的模型非线性、系统复杂或不稳定等缺点,提出了一种基于压电迟滞对称性及单向单回路循环的微位移线性控制系统。 首先利用压电迟滞效应中回路正调曲线与逆调曲线之间的轴对称性质,使二个性能一致的压电位移作动器位于回路的对称点,其迟滞非线性效应得 以相互抵消,从而使其总的位移输出与输入驱动电压呈线性关系;其次,在控制策略的选择上,为避免因次级回路的出现而导致的复杂性与不稳定性,并保证压电系统的输出精度,位移调节过程中仅采用一个确定的主回路,且二个位移作动器均按此主回路的单向逆时针方向调节;依据所提出的模型和算法,进行了实验验证,并对误差进行了分析与补偿;结果表明模型位移输出精度达到 nm 级,最大误差 15 nm,平均误差约 0 nm;同时该模型还具备结构简单、计算量小、易于实现、输入与输出为线性关系等优点。

    Abstract:

    Aiming at the shortcomings of the current piezoelectric micro-displacement control system, such as model nonlinearity, complex system or instability, a micro - displacement linear control system based on piezoelectric hysteresis symmetry and one-way single-loop cycle is proposed. Firstly, two piezoelectric displacement actuators with the same performance are located at the symmetric point of the loop by using the axisymmetric property between the positive and inverse hysteresis curves, and their hysteresis nonlinear effects cancel each other, so that the total displacement output has a linear relationship with the input drive voltage. Secondly, in order to avoid the complexity and instability caused by the appearance of the secondary loop and ensure the output precision of the piezoelectric system, only one determined main loop is used in the displacement adjustment process, and the two displacement actuators are adjusted according to the one-way counterclockwise direction of this main circuit. According to the proposed model and algorithm, experimental verification is carried out, and the error is analyzed and compensated. The results show that the displacement output precision of the model reaches nm level, the maximum error is 15nm, and the average error is about 0nm. At the same time, the model has the advantages of simple structure, small amount of calculation, easy implementation, and linear relationship between input and output.

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王荣秀, 王 波.基于压电迟滞对称性的线性微位移控制作动器[J].重庆工商大学学报(自然科学版),2022,39(5):62-69
WANG Rong-xiu, WANG Bo. Linear Micro-displacement Control Actuator Based on Piezoelectric Hysteresis Symmetry[J]. Journal of Chongqing Technology and Business University(Natural Science Edition),2022,39(5):62-69

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  • 在线发布日期: 2022-09-27