Technology equipment management, as an important part of technical management of technology, has been more and more emphasized by all kinds of components research institutes with few product types and few batches, however, the features of too many types of technology equipments, large proportion of specific tools, frequent design and revamping of tools and so on make normal technology equipment management method impossible to obtain good effect. The sustainably upgrading of technology equipment management level can be boosted by the reflection and analysis from such three aspects as perfection of institutional flow, three-dimensional classification and informationalized dynamic management and by the studies on technology equipment management model of componenttype research institutes.